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MS Materials Gas and Chemical Expert in Korea

MS Materials is a materials company that manufactures and
sells specialized gases and chemcials used in the semiconductors
and display manufacturing.

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ABOUT US

MS Materials is a material company that manufactures and sells gas and chemical materials for semiconductor and display manufacturing processes.

Started as a gas analysis business in special gas and general gas in 2008, MS Materials is a specialized materials company that manufactures and sells special gases for semiconductor, precursor, silicon wafer manufacturing and slurries for CMP, MEMS processes. With ongoing technology development to keep pace with the growth of domestic and overseas semiconductor and display industries, MS Materials is playing a pivotal role in the domestic and overseas material markets.

MS Materials aims to grow with the customers, constantly seeking new challenges, embracing innovation for continuous growth.

Thank you.

PRODUCT

Speciality Gas

Special gases are very rare or high purity gases that are generally used in the semiconductor and display industries.

MS Materials can deliver CH3CL, HCL, DMA, TCS, STC and DCS.

TCS
Trichlorosilane(TCS : SiHCl3)MSDS

Colorless, liquefied gas with the smell of hydrogen chloride. Not explosive, but explosive reactions occur with acetonitrile and diphenylsulfoxide. Reacts violently with alcohol, amine, metal oxide and peroxide, causes corrosive reaction to metal.

Usage
chemical vapor, epitaxial silicon deposition (CVD process / EPI)
CYLINDERS
60L(60KG) / 210L(250KG)
DCS
DCS
DICHLOROSILANE(DCS : SiH2Cl2)MSDS

Colorless, transparent liquefied gas with a strong odor. Reacts with corrosive water or moist air and produces hydrogen chloride and polymeric siloxane, which may ignite spontaneously. Air and mixture may cause explosion when heated in confined spaces.

Usage
Nitride film (SiN) deposition in semiconductor manufacturing process / Precursor synthesis raw material
CYLINDERS
10L(9KG) / 40L(35KG) / 44L(41KG) / 440L(450KG) / 995L(900KG)
DMA
Dimethylamine(DMA : C2H7N)MSDS

Colorless, transparent water-soluble liquid with a fishy smell. When reacting with peroxide substances, they can violently decompose and form explosive substances. Do not mix with acids, metals, halogens, combustible substances, oxidizing agents, etc.

Usage
Raw materials for rubber chemicals (vulcanization accelerators, anti-aging agents) / paper chemicals and water treatment agents / synthetic raw materials for precursors
CYLINDERS
47L(23KG)
STC
Tetrachlorosilane(STC : SiCl4)MSDS

Colorless, transparent liquid vapor liquefied gas with a suffocating odor. Exothermic reaction with water to produce highly corrosive hydrofluoric acid and silicic acid.

Usage
Manufacture of tetraalkoxysilane and silica fiber optical waveguide / raw material of silica and hydrogen chloride / synthetic rubber additive
CYLINDERS
47L(30KG) / 60L(60KG)
HCL
HCL
Hydrogen chloride(HCl)MSDS

Colorless or pale yellow liquefied gas with a strong odor. Reacts violently with water to release heat and toxic/corrosive/combustible gases. Strong corrosiveness.

Usage
Etching, LCD chemicals, polysilicon manufacturing / Metal surface treatment and water treatment / pesticides, dyes, iron chloride, etc.
CYLINDERS
49L(25KG) / 900L(500KG)
MC
Chloromethane(CH3Cl)MSDS

Colorless, transparent liquefied gas with an etheric odor. Do not mix with metals and halogens. Pyrolysis produces phosgene, acid halogen compounds, and carbon oxides.

Usage
Organic synthesis (butyl rubber, silicone resin, methylcellulose production) / extractant, low temperature solvent, refrigerant (refrigerant) / medicine, pesticide, foaming agent, non-combustible film
CYLINDERS
1175L(940KG)

CMP Slurry

The CMP process is one of the eight semiconductor processes that smoothly polish the surface of a semiconductor wafer using chemical and mechanical forces. In the semiconductor process, it is an essential process to make only thin films of uniform thickness, as it is not possible to make thin films of uniform thickness only by the deposition process.

CMP(Chemical Mechanical Polishing)

Major semiconductor application processes include STI, ILD/IMD CMP processes, and MS Materials produces Ceria Slurry used during aforementioned processes. Our product characteristics are High Selectivity, Low Scratch, Low Defect and customization for individual customers. In addition, MS Materials Ceria Slurry can be applied for MEMS device polishing and has excellent performance and characteristics.

Usage
Used to polish the wafer smoothly by using chemical reaction and mechanical force.
CYLINDERS
10KG / 200KG
CMP SLURRY PROCESS
  • Calcinations
  • Milling
  • Product Direct
  • Final Direct
VOC CMP SLURRY DEVELOPMENT
  • Heat Stability
  • Economic feasibility
  • Eco-friendly
  • High remove rate
  • Low scratch, defect, dishing

SERVICES

Services

MS Materials provides qualitative and quantitative analysis for semiconductor and display processes and various industrial process gases.

Service Overview
  • Process Analysis in Semiconductor, display industrial process, nuclear & thermal power plant atmospheric component analysis, fuel cell manufacturing, chemical plant, LED gas process, solar cell gas manufacturing.
  • Industrial process high purity gas purity analysis, impurity content analysis (qualitative and quantitative).
  • Quality check for mixed gas and provides component analysis technology support.
  • Gas analysis for calibration of analysis equipment.
  • Pretreatment and Analysis of flammable, toxic, and corrosive gases.

ABOUT US

HISTORY

2019
  • Sept.
    • Automated Dimethylamine Purification, Manufacturing facility is added.
2018
  • Nov.
    • MS Materials Yedang (2nd factory) opens and goes into operation.
    • STC automated manufacturing facility is added.
    • DCS automated manufacturing facility is added.
    • TCS automated manufacturing facility is added.
2017
  • June
    • Acquires ISO 14001 (environmental mgmt system) / OHSAS 18001 (safety & health mgmt system)
2016
  • July
    • CMP Slurry pilot production starts.
  • Jan.
    • Compay-affiliated Research Center is established.
2015
  • Oct.
    • Chlorinated methane filling facility is added.
2014
  • Feb.
    • DCS Manufacturing facility is added.
  • Jan.
    • Company name changes to MS Materials Co., Ltd.
2013
  • May
    • Acquires ISO 9001 (Quality Mgmt System)
  • Mar.
    • TCS manufacturing facility is added.
  • Jan.
    • Multi-component mixing and standard gas facility is expanded.
    • Toxic gas analysis system is implemented.
    • Chloro, silane. TMA repackaging system is installed.
2011
  • Mar.
    • Gas analysis service (semiconductor, nuclear medicine, various industrial fields, etc.) is added.
    • Standard material production starts.
    • Multi-component mixed gas production starts.
2010
  • 10월
    • Research Institute is added.
    • Precision analysis test facility goes into operation.
    • Ultra-high purity oxygen hydrogen production starts.
    • Fire extinguishing agent (F-125) production starts.
  • June
    • Venture Company certification is acquired.
2008
  • Mar.
    • Gaia Gas Research Institute is establised.

CERTIFICATIONS

MS Materials aims to provide the best quality and service by embracing changes, acquiring and maintaining
the latest certifications in quality and environmental regulations.

  • Quality Mgmt System Quality Mgmt System
  • OHSAS 180001 (Safety & Health Management System OHSAS 180001 (Safety & Health Management System)
  • Environment Mgmt System Environment Mgmt System
  • Certificate of company affiliated research Certificate of company affiliated research

NEWS & EVENT

NEWS & EVENTview more